A Novel Radiative Substrate Heater

Authors : Abdullah Ceylan, Erdal Kaynak, Şadan Özcan, Tezer Firat

Pages : 265-269

Doi:10.3906/sag-1204-80

View : 19 | Download : 11

Publication Date : 9999-12-31

Article Type : Makaleler

Abstract :In this work, we have developed a new low cost radiative substrate heater for deposition of high-Tc superconducting thin films. It has all the features required for the preparation of high quality superconducting thin films. It is possible to reach ~ 800 °C substrate temperature with it by using only one 250 W halogen projector bulb.
Keywords : Substrate heater, Magnetron sputtering, YBa2Cu3O7-d thin film.