- Electronic Letters on Science and Engineering
- Vol: 12 Issue: 2
- MICROFABRICATION PROCESS of GRAPHENE FIELD EFFECT DEVICES and INVESTIGATION of LITHOGRAPHIC RESIDUES...
MICROFABRICATION PROCESS of GRAPHENE FIELD EFFECT DEVICES and INVESTIGATION of LITHOGRAPHIC RESIDUES by SURFACE ENHANCED RAMAN SPECTROSCOPY
Authors : Hidayet Çetin
Pages : 6-6
View : 6 | Download : 5
Publication Date : 2016-08-01
Article Type : Other
Abstract :At the fabrication of Graphene Field Effect Transistor (GFET), microfabrication process has been extensively used. Microfabrication process has usually left impurities. However, impurities could be much more important at graphene-like two dimensional systems. In this work, pristine and photolithography-applied graphene samples were investigated by Surface Enhanced Raman Spectroscopy (SERS) which is a powerful method to detect molecules even if only one molecule [1- 2]. Furthermore, after the photolithography process, to obtain more clean graphene surface, several methods were applied. The obtained electrical and SERS results were associated and compared to each other’s to propound a new lift-off solvents.Keywords : Graphene, SERS, Lithographic Residues.