- Turkish Journal of Physics
- Vol: 28 Issue: 4
- Effect of Development Time on Polymer Phase Separation in a PMMA Resist
Effect of Development Time on Polymer Phase Separation in a PMMA Resist
Authors : Mohammad Naeem Khalid, Shazia Yasin And
Pages : 271-276
View : 8 | Download : 5
Publication Date : 9999-12-31
Article Type : Makaleler
Abstract :Developer composition type and development technique are known to influence surface and edge roughness in polymethylemethacrylate (PMMA); and it is during development, we believe, that the result is most influenced by the phase separation into polymer-rich and polymer-poor regions. This polymer phase separation is more prominent in a weaker developer and low temperature. In this paper, we investigate the effect of development time on the extent of polymer phase separation in an exposed PMMA developed in a standard developer i.e. 1:3 MIBK:IPA at 20 °C and rinsed in pure IPA for 30 sec. The polymer phase separation is found to increase with the development time.Keywords : e-beam, surface roughness, PMMA, phase separation, develop time.