- Turkish Journal of Engineering and Environmental Sciences
- Vol: 34 Issue: 4
- The design and analysis of a novel MEMS force amplifier
The design and analysis of a novel MEMS force amplifier
Authors : Ergin KOSA, Ümit SÖNMEZ, Hüseyin KIZIL, Levent TRABZON
Pages : 253-259
Doi:10.3906/kim-1210-5
View : 6 | Download : 3
Publication Date : 9999-12-31
Article Type : Makaleler
Abstract :Compliant micromechanisms achieve high amplification of forces that can be used as a cutting force in micro- and nanofabrication. In the present study, we designed, simulated, and optimized a novel, simple micro-compliant system by SOI-MUMPs technology. The position and quasi-static analysis of a rigid body model were derived by MATLAB and simulated in ANSYS. It was found that an amplification factor of as much as 11.1 was achieved. The amplification factor increased as the micro-compliant force amplifier got closer to 0, but it decreased as the crank angle was further from 0.Keywords : Micromechanism, compliant, force amplifier, MEMS, SOI-MUMPs technology