- International Journal of Innovative Research and Reviews
- Vol: 5 Issue: 1
- Microstructure and Mechanical Properties of TiN/TiCN/TiC Multilayer Thin Films Deposited by Magnetro...
Microstructure and Mechanical Properties of TiN/TiCN/TiC Multilayer Thin Films Deposited by Magnetron Sputtering
Authors : Abbas Razmi, Ruhi Yesildag
Pages : 15-20
View : 9 | Download : 4
Publication Date : 2021-07-15
Article Type : Research
Abstract :Enhancement of scratch and hardness mechanical properties of TiN/TiCN/TiC multilayer thin films deposited on commercially pure Titanium (Cp-Ti) and silicon (Si) substrates via magnetron sputtering technique were investigated in this study. The structural, chemical and mechanical properties of the coatings were characterized by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM), nanoindentation and scratch tests. Results of the XRD analysis showed reflections corresponded to cubic and polycrystalline structure for TiN/TiCN/TiC films. XPS analysis of the uppermost layer of TiN/TiCN/TiC film revealed that titanium nitride and titanium carbide were formed in the coatings. According to SEM cross-sectional images, the coatings demonstrated dense structure as well as good adhesion to the substrate with a thickness of 3.035 μm. Nanoindentation hardness and critical load valueof scratch test results of TiN/TiCN/TiCmultilayer filmcoated on Cp-Ti substrate materials obtained 19.75 GPa and 21 N, respectively.Keywords : Magnetron sputtering, TiN/TiCN/TiC coating, Cp-Ti, Scratch, Cp-Ti, Scratch, Nanoindentation