- Gazi University Journal of Science
- Vol: 29 Issue: 4
- GROWTH OF INGAAS/INALAS SUPERLATTICES BY MOCVD AND PRECISE THICKNESS DETERMINATION VIA HRXRD
GROWTH OF INGAAS/INALAS SUPERLATTICES BY MOCVD AND PRECISE THICKNESS DETERMINATION VIA HRXRD
Authors : Sezai Elagöz, Ilkay Demir
Pages : 947-951
View : 18 | Download : 7
Publication Date : 2016-12-19
Article Type : Other
Abstract :In this study, we report the growth studies of InGaAs/InAlAs superlattices (SLs) with thin layer thicknesses which will be used for quantum cascade laser (QCL) structures, grown by Metal Organic Chemical Vapor Deposition (MOCVD) technique. We utilize high resolution X-ray diffraction (HRXRD) to determine the single layer thickness and period thicknesses of SLs. Measurement results show that by establishing very low growth rates (~0,1 nm/s), the single thin layers and SLs can be grown well by MOCVD in a controllable and repeatable way with high crystalline and interface quality.Keywords : Superlattice, InGaAs, InAlAs, MOCVD, X-ray diffraction