- Sakarya Üniversitesi Fen Bilimleri Enstitüsü Dergisi
- Vol: 23 Issue: 4
- Structural Investigation of ZnO Thin Films Obtained by Annealing after Thermal Evaporation
Structural Investigation of ZnO Thin Films Obtained by Annealing after Thermal Evaporation
Authors : Gökhan UTLU
Pages : 650-656
Doi:10.16984/saufenbilder.450190
View : 10 | Download : 3
Publication Date : 2019-08-01
Article Type : Other
Abstract :In this study, ZnO thin films, with thicknesses of 80-240 nm are prepared by thermal evaporation of ZnO pellets on glass substrates. Then, these films are annealed in air atmosphere at 300 ° C for 2 hours. ZnO formation has been investigated as a function of the film thickness. As deposited films appear to be brown since they are rich in Zn, whereas Zn phases are replaced by ZnO phases after annealing and the films show a transparent appearance. In thinner films (80-100 nm) the ZnO phases are not observed but Zn phase intensities decrease. Especially when the thickness is increased in 132-240 nm thick films, ZnO phases are observed after annealing, and their intensity is increased and polycrystalline structures are formed. XRD measurements show that Zn (002), Zn (100) and Zn (101) phases are present in our films before annealing. After annealing, the intensity of these zinc peaks decreases firstly due to the film thickness, and then at ZnO (100), ZnO (002) and ZnO (101) phases are formed. SEM, AFM analyzes show that ZnOs are formed in the form of nanorods on the surface and after these anneal the columnar growths occur and the particle diameters increase.Keywords : ZnO thin film, thermal evaporation, annealing, XRD, SEM